If you're looking for a quick overview, Satnam Singh who worked at Google on Silver Oak / OpenTitan, gave an interesting 50m talk related to his work: https://youtube.com/watch?v=ujmgPCIWuU4 / mirror: https://ghostarchive.org/varchive/ujmgPCIWuU4 [summary: https://g.co/gemini/share/07c6439e8a78 / mirror: https://archive.vn/51k4y]

OpenTitan (RISC-V based tamper-resistant open specification RoT/TPM/SE) themselves have a neat write-up on designing against hardware attacks: https://opentitan.org/book/doc/security/implementation_guide... / mirror: https://archive.vn/UqAVo