We can prevent this from happening by enforcing 100-year-old antitrust laws.
Antitrust laws don't work because they're subjective and are enforced by political appointees.
The simpler solution is a tax on scale -- a graduated corporate revenue tax, aggregated across any group of entities which meet the common control [1] criteria. Then it's just a tax, and you simply have to collect it. Very little wiggle room.
If splitting your company in half wouldn't impair any of its lines of business, the CEO has a powerful financial incentive (lower tax rates on the two halves) to do so.
I don't think that works in the situation of fabs. They are big and expensive pieces of tech with the latest fabs being the most expensive to construct.
You can't exactly break up a chip manufacturer when they have just 1 or 2 plants tooled for the latest memory.
IMO, recognizing chip fabrication as a national security asset and turning it into a public corporation would be the better way to go. Let the likes of intel/amd/or micron continue developing chips. But also, take control of the most expensive and risky part of chip manufacturing to make sure we don't fall behind due to corporate budget cuts. You also keep and continue to build expertise in a vital part of modern society.