You're just talking about a lithography machine. Patterning is one step out of thousands in a modern process (albeit an important one). There's plenty more stuff needed for a production line, this isn't a 3D printer but for chips. And that's just for the FEOL stuff, then you still need to do BEOL :). And packaging. And testing (accelerated/environmental, too). And failure analysis. And...

Also, you know, there's a whole process you'll need to develop. So prepare to be not making money (but spending tons of it on running the lines) until you have a well tested PDK.