alt Hacker NewsCymer builds the EUV light source, but the biggest enabler for High NA EUV is using anamorphic optics (ie asymmetric horizontal and vertical magnification) from Zeiss: https://www.asml.com/en/news/stories/2024/5-things-high-na-e...
Cymer builds the EUV light source, but the biggest enabler for High NA EUV is using anamorphic optics (ie asymmetric horizontal and vertical magnification) from Zeiss: https://www.asml.com/en/news/stories/2024/5-things-high-na-e...