Earthquake isolation can be pretty amazing. Here’s a video of a data center during the big 2011 quake. The camera is attached to the outer wall so the point of reference makes the wrong side look like it’s shaking, but you can see the people walking without difficulty during some pretty heavy shaking. A fab will have even better stuff.
Wow, it's incredible how far civil engineering has come in the past 600 years. To think that we used to have bridges collapse all the time, and buildings crack and collapse, and now we have buildings that can withstand a whole earthquake.