Ehm, sorry, but no, this is not how lithography works. You cannot "hide" functionality in circuitry your machines are producing if your machines' job is to shine light through a mask.
You'd have to be the producer of the machine producing the mask. Or, even better, the software that produces the plan according to which a machine produces a mask.
I didn't say to hide it. My suggestion is to create international AI safety rules which companies must be in compliance with if they want to buy and service ASML machines.