Ziphu (who make GLM) use Huawei Ascend processors made by SMIC. Huawei use a combination of domestic memory from CXMT and leftover (pre-sanctions) memory from Samsung.

Just like the rest of the world, including the US (Intel, Micron), SMIC are currently using ASML lithography equipment (DUV, not EUV), but Shanghai Aishengna are now moving into early production with their own DUV machines, with SMIC and CXMT as early customers.

There is also a state sponsored Chinese EUV development underway.