My chatbot found an unsourced claim that Bruce Sterling used it in 1992.

Google Books gets me back as far as 1990, but I don't trust it (https://www.google.co.uk/books/edition/The_Law_and_Business_...) - I think there's a good chance the publication date is wrong.

Earliest reference in British Newspaper Archive is 1997. I wonder if anyone has access to newspapers.com?

But if it first crops up on usenet in 1993, I can't imagine it being coined much earlier than that.